shallow trench isolation process flow
TheSTIprocessstartsinthesamewayastheLOCOSprocess.ThefirstdifferencecomparedtoLOCOSisthatashallowtrenchisetchedintothesilicon ...,2024年1月28日—ShallowTrenchIsolation(STI)isthepreferredisolationtechniquefordeepsub-microntechnologybecauseitcomplete...
Process optimization for shallow trench isolation etch using ...
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2023年8月4日—OnesingleALEorHARetchprocessusuallytakestensofminutesorevenanhourtocomplete,whichgreatlyextendstheoverallwaferprocessing ...
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